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Lawrence J. Overzet

Department Head, Professor
RL 3.404
The University of Texas at Dallas
800 West Campbell Road
Richardson, TX 75080, USA
Phone: 972-883-2154
Mailstop: RL10

Plasma Science and Applications Lab (PSAL)

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 ee faculty

Lawrence J. Overzet

Department Head
Professor of Electrical Engineering
Professional Engineer


PhD in Electrical Engineering, University of Illinois, Urbana, Illinois


Prof. Overzet joined The University of Texas at Dallas in 1988, was promoted to Prof. in 2000 and served as Associate Department Head from 2006 until 2012. He has been a Visiting Scientist at the University of Orleans, France for a month each summer since 2004 where he has worked with Prof. R. Dussart on plasma etching and on microplasmas. He spent the 2012-13 AY there as a Marie Curie International Incoming Fellow.

Prof. Overzet is a Registered Professional Engineer in Texas, Honorary Member in the Golden Key International Honour Society, Senior Member of the IEEE and a Fellow of the AVS.

Prof. Overzet was UT Dallas's Polykarp Kusch Lecturer in 2005. When Nobel laureate Dr. Polykarp Kusch retired in 1982, UT Dallas established a program of annual lectures with the theme: "Concerns of the Lively Mind" to honor him. The Kusch Lecture is thought to be UT Dallas's "highest faculty honor".

Prof. Overzet was also a recipient of the Regents' Outstanding Teaching Award in 2011. This award is the University of Texas System's highest teaching award.

Research Interests

Plasma Science, Plasma Processing, Etching, Deposition, Microplasmas, Semiconductor Device Manufacturing, Carbon Nanotubes, Semiconductor Device Theory