0VERZET, LAWRENCE
EDUCATION
PhD in Electrical Engineering, University of Illinois, Urbana, Illinois
OVERVIEW
Professor Overzet is a fellow of the AVS, senior member of the IEEE, and a Registered Professional Engineer in Texas. He was chosen to be UTD’s Polykarp Kusch Lecturer in 2005 and was given the UT System’s “Regent’s Outstanding Teaching Award” in 2011. His research interests are varied but have primarily revolved around the study of plasmas used in semiconductor processing.
RESEARCH INTEREST
Plasmas used in semiconductor processing, time resolved plasma diagnostics, new uses for plasma in processing, plasma etching & deposition of new materials.